Control of spatial distribution of plasma density by the variable capacitor in a capacitively coupled plasma

Ho-Jun Moon ,  Chin-Wook Chung

한국진공학회 학술발표회초록집

2018 .08

Plasma Diagnostics using Optical Emission Spectroscopy on Argon Capacitively Coupled Plasma with Various Line-of-Sight

Jaemin Song ,  Jongsik Kim ,  Dae Chul Kim 외 6명

한국진공학회 학술발표회초록집

2019 .08

Microtrenching of SiO₂ contact hole etching in C₄F₈/Ar capacitively coupled plasma

S. J. Kim ,  J. J. Lee ,  H. J. Yeom 외 2명

한국진공학회 학술발표회초록집

2017 .08

Characterization of SiO₂ Over Poly-Si Mask Etching in Ar/C₄F₈ Capacitively Coupled Plasma

In Ho Seong ,  Jang Jae Lee ,  Chul Hee Cho 외 3명

Applied Science and Convergence Technology

2021 .11

Initial Study of Electron Temperature and Density Simulation on Capacitively Coupled RF He Plasma

Deokho Hwang ,  Sanghyeok Pa ,  k 외 7명

한국진공학회 학술발표회초록집

2019 .08

A study on Electron Heating Mechanism in RF Capacitively Coupled Plasma at Low Discharge Current based on PIC-MCC simulation

Si Jun Kim ,  Jang Jae Lee ,  Young Seok Lee 외 9명

한국진공학회 학술발표회초록집

2021 .02

RF 축전 결합형 플라즈마 장비에서 발생하는 줄무늬의 형성 원리

박건우 ,  천정빈 ,  김청호 외 1명

새물리

2023 .09

On the role of the singlet metastables in capacitively coupled oxygen discharges

Jon Tomas GUDMUNDSSON

한국진공학회 학술발표회초록집

2016 .08

Inductively Coupled Plasma Simulation Based on Electron Energy Distribution Function and Process Pressure

So ,  a Lee ,  Yejin Shon 외 3명

Applied Science and Convergence Technology

2020 .11

Nano Pattern 된 Ultra Low-k Dielectric 물질에서의 C₃H₂F₆를 이용한 Low Damage 식각 공정 연구

탁현우 ,  성다인 ,  김두산 외 2명

한국진공학회 학술발표회초록집

2020 .08

Adaptive Mesh Method Applied to Poisson Solver Module for 3D Capacitively Coupled Plasma Discharge Simulation

So ,  a Lee ,  Yejin Shon 외 3명

Applied Science and Convergence Technology

2020 .05

Numerical Modeling of Floating Electrodes in a Plasma Processing System

Junghoon Joo

Applied Science and Convergence Technology

2015 .07

Characteristics of SiO₂ Etching in a C4F8/Ar/O₂ pulse modulation capacitively coupled plasma

조철희 ,  김시준 ,  이장재 외 4명

한국진공학회 학술발표회초록집

2018 .02

Plasma Etching of Parylene and SU-8 Polymer in Capacitively Coupled O₂ Plasma

Jewon Lee ,  Sanghyeok Pa ,  k 외 7명

한국진공학회 학술발표회초록집

2019 .08

A Brief Review of Electron Kinetics in Radio-Frequency Plasmas

Hyo-Chang Lee

Applied Science and Convergence Technology

2019 .07

Characteristics of SiO₂ Etching by Capacitively Coupled Plasma with Different Fluorocarbon Liquids (C₇F₁₄, C₇F₈) and Fluorocarbon Gas (C₄F₈)

Seung-Wan Yoo ,  Chulhee Cho ,  Kyungtae Kim 외 2명

Applied Science and Convergence Technology

2021 .07

Study of Nitrogen Plasma Treatment on Indium Tin Oxide Thin Films

Ji-Won Jang ,  Hyeok Jee ,  Hye-Won Seo

새물리

2020 .01

Optical and Electrical Characterization of Sol-Gel Deposited ZnO thin film after Plasma Treatment in Capacitively Coupled N₂O Discharges

진호원 ,  조관식 ,  손근용 외 1명

한국진공학회 학술발표회초록집

2017 .02

낮은 GWP의 C₃H₂F₆ 기반 화합물의 Ultra Low-k Dielectirc 식각 연구

탁현우 ,  장준기 ,  성다인 외 4명

한국진공학회 학술발표회초록집

2020 .02

L- Hydrofulorocarbon Plasma를 이용한 Dielectric 식각 물질 연구

탁현우 ,  홍인표 ,  성다인 외 4명

한국진공학회 학술발표회초록집

2020 .08